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Technical Services

Refurbish of KLA-Tencor metrology equipment
Refurbishment of overlay, resistivity and macro metrology KLA-Tencor equipment. Refurbishment done under cleanroom mini environment in Singapore.

Preventive Maintaince and Corrective Maintainance Service
Support preventive maintainance and corrective maintainance for overlay, resistivity and macro defect KLA-Tencor measurement tools

Technical Support
Technical Support Services for overlay, resistivity and macro defect metrology KLA-Tencor equipment for difficult issues.
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Product Type
Overlay
1. 5200XP
2. 5300
3. Archer10/Archer10XT
4. Archer+
5. Archer 100
6. Archer 200
7. Archer 300
8. Archer 300+
1. 5200XP
2. 5300
3. Archer10/Archer10XT
4. Archer+
5. Archer 100
6. Archer 200
7. Archer 300
8. Archer 300+
Resistivity Models Types
1. RS35
2. RS55
3. RS75
4. RS100/RS100C
5. RS200
Macro Defect Review Types
1. Viper 2401
2. Viper 2410
3. Viper 2435

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